日本三丰Mitutoyo FS70 半导体检测显微镜,半导体观测显微镜 ,工作距离足够长，倍数高，能够应用在各种检测场合和质量确认方面。搭配Mitutoyo的全系列可见光远场校正镜头，显微镜系统的放大倍率可涵盖20X到8000X，工作距离范围从6到34mm。对焦目镜可安装直径为25mm的测量分划板来测量。50/50三端输出显微镜的粗调范围为50mm，精确调整分辨率可达0.1mm，并可同时进行视频输出和双目观测。 FS70系列半导体检测显微镜单元是一款带目镜观察的小巧显微镜单元。适于检测金属表面、半导体、液晶基板、树脂等。可应用于切割、修整、校正、 给半导体电路做标记/ 薄膜(绝缘膜) 清洁与加工、液晶彩色滤光器的修复(校正错误)。还可用作光学观察剖面图以便探针分析半导体故障。
产品特点采用Mitutoyo远场校正镜头、 三端输出设计可轻松接收视频、 转盘可接最多四个物镜
产品型号FS70L4-TH
应用领域切割修整校正给半导体电路做标记薄膜(绝缘膜)清洁与加工液晶彩色滤光器的修复(校正错误)还可用作光学观察剖面图以便探针分析半导体故障
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瞳距调节范围 光通比
51 - 76mm 可调100/0 or 0/100
技术参数
标准型号 | FS70 378-184-1 | FS70-TH 378-184-3 | FS70Z 378-185-1 | FS70Z-TH 378-185-3 | FS70L 378-186-1 | FS70L-TH 378-186-3 | FS70L4 378-187-1 | FS70L4-TH 378-187-3 |
Short base model No 短基础型号 | FS70S 378-184-2 | FS70-THS 378-184-4 | FS70ZS 378-185-2 | FS70Z-THS 378-185-4 | FS70L-S 378-186-2 | FS70L-THS 378-186-4 | FS70L4S 378-187-2 | FS70L4-THS 378-187-4 |
聚焦调节 Focus adjustment | 使用同心粗调(3.8mm/rev)和微调(0.1mm/rev)对焦轮(右/左)实现50mm行程范围 | |||||||
图像 Image | 正像 Erect image | |||||||
瞳距 Pupil distance | Siedentopf 登托夫型, 调节范围:2 - 3” / 51 - 76mm | |||||||
视场数 Field number | 24mm | |||||||
俯角 Tilt angle | - | 0°-20° | - | 0°-20° | - | 0°-20° | - | 0°-20° |
光通比 Optical Pass Ratio | 固定(目 镜/TV＝ 50%/50%) | 可调型(目 镜/管径＝ 100%/0%： 0%/100%) | 固定(目 镜/TV＝ 50%/50%) | 可调型 (目镜/管径＝100%/0% or 0%/100%) | ||||
防护滤光片 | - | 内置激光滤光片 | ||||||
管径镜头 Tube lens | 1x | 1x-2x放大 | 1x | |||||
适用激光 | - | 1064/532/355nm | 532/266nm | |||||
相机安装端口 | C-mount (适用适配器B选件) | 使用带TV接口的激光 | C-mount开关(带绿色滤光片转换开关) | |||||
照明系统(选件) | 亮视场反射照明 (科勒照明、带孔径光阑) 12V100W亮视场反射照明、无极亮度调节、光纤长度 | |||||||
物镜（用于观察） | M Plan Apo, M Plan Apo SL, G Plan Apo | |||||||
物镜（用于激光切割） | - | M/LCD Plan NIR, M/LCD Plan NUV | M Plan UV | |||||
载重 | 14.5kg | 13.6kg | 14.1kg | 13.2kg | 14.2kg | 13.5kg | 13.9kg | 13.1kg |
重量（主机） | 6.1kg | 7.1kg | 6.6kg | 7.5kg | 6.4kg | 7.2kg | 6.7kg | 7.5kg |
灯泡更换 | 标准: 卤素灯泡 (12V, 100W) (517181) | |||||||
用于光纤传导照明装置 (12V, 100W) (378-700) | ||||||||
注：镜体的载重不包括物镜镜头和目镜的重量。
四种主体类型：
FS70-带1X管镜头的主体（非激光）
FS70Z-主体（非激光），带1X-2X变焦放大倍率转换器
FS70L-三YAG激光波长1064/532/355nm 主体1X*
FS70L4-两个波长范围532/266nm 主体1X*
Mitutoyo FS70 Inspection Microscope | |
Microscope System | |
Mitutoyo FS70 Microscope System (includes #55-999, #56-000, #56-001, #56-002) | #56-003 |
Microscope Head (One Required) | |
Mitutoyo FS70 Microscope Head | #55-999 |
Microscope Stand (One Required) | |
Mitutoyo FS70 Microscope Stand | #56-000 |
Microscope Eyepieces in Pairs (One Required) | |
10X WF Focusing Eyepieces, 24mm Field Dia. | #56-001 |
15X WF Focusing Eyepieces, 16mm Field Dia. | #56-310 |
20X WF Focusing Eyepieces, 12mm Field Dia. | #56-004 |
Microscope Turret (One Required) | |
Manual 4 Position Turret for Mitutoyo FS70 | #56-002 |
Motorized 4 Position Turret for Mitutoyo FS70 | #56-313 |
Microscope Stage (Optional) | |
2" x 2" XY-Axes Positioning Stage | #56-011 |
Accessories and Reticles (Optional) | |
Fiber Optic Light Guide for FS70, 72" Length | #56-008 |
Polarizer Set | #56-009 |
C-Mount Coupler (1X) for Video Adaptation | #56-010 |
90° Crossline, Reticle | #56-005 |
Concentric Circles Reticle, 1.2 - 18mm Dia, 1.2mm Increments | #56-007 |
20mm Line/0.1mm Divisions, Reticle | #56-183 |
5mm Line/0.05mm Divisions, Reticle | #56-184 |
90°/60° Crossline, Reticle | #56-311 |
Stock No. | Objective | WD (mm) | Resolving Power (μm) | 10X Eyepiece #56-001 | 15X Eyepiece #56-310 | 20X Eyepiece #56-004 | |||
Mag. | FOV (mm) | Mag. | FOV (mm) | Mag. | FOV (mm) | ||||
#58-235 | M Plan Apo 1X | 11 | 11 | 10-20X | 24-12 | 15-30X | 16-8 | 20-40X | 12-6 |
#46-142 | M Plan Apo 2X | 34 | 5 | 20-40X | 12-6 | 30-60X | 8-4 | 40-80X | 6-3 |
#46-143 | M Plan Apo 5X | 34 | 2 | 50-100X | 4.8-2.4 | 75-150X | 3.2-1.6 | 100-200X | 2.4-1.2 |
#66-383 | M Plan Apo 7.5X | 35 | 1.3 | 75-150X | 3.2-1.6 | 112.5-225X | 2.13-1.07 | 150-300X | 1.6-0.8 |
#46-144 | M Plan Apo 10X | 33.5 | 1 | 100-200X | 2.4-1.2 | 150-300X | 1.6-0.8 | 200-400X | 1.2-0.6 |
#46-145 | M Plan Apo 20X | 20 | 0.7 | 200-400X | 1.2-0.6 | 300-600X | 0.8-0.4 | 400-800X | 0.6-0.3 |
#46-146 | M Plan Apo 50X | 13 | 0.5 | 500-1000X | 0.48-0.24 | 750-1500X | 0.32-0.16 | 1000-2000X | 0.24-0.12 |
#46-147 | M Plan Apo 100X | 6 | 0.4 | 1000-2000X | 0.24-0.12 | 1500-3000X | 0.16-0.08 | 2000-4000X | 0.12-0.06 |
#46-398 | M Plan Apo 20X SL | 30.5 | 1 | 200-400X | 1.2-0.6 | 300-600X | 0.8-0.4 | 400-800X | 0.6-0.3 |
#46-399 | M Plan Apo 50X SL | 20.5 | 0.7 | 500-1000X | 0.48-0.24 | 750-1500X | 0.32-0.16 | 1000-2000X | 0.24-0.12 |
#46-401 | M Plan Apo 100X SL | 13 | 0.5 | 1000-2000X | 0.24-0.12 | 1500-3000X | 0.16-0.08 | 2000-4000X | 0.12-0.06 |
#34-247 | M Plan Apo 5X HR | 25.5 | 1.3 | 50-100X | 4.8-2.4 | 75-150X | 3.2-1.6 | 100-200X | 2.4-1.2 |
#58-236 | M Plan Apo 10X HR | 15 | 0.6 | 100-200X | 2.4-1.2 | 150-300X | 1.6-0.8 | 200-400X | 1.2-0.6 |
#58-237 | M Plan Apo 50X HR | 5.2 | 0.3 | 500-1000X | 0.48-0.24 | 750-1500X | 0.32-0.16 | 1000-2000X | 0.24-0.12 |
#58-238 | M Plan Apo 100X HR | 1.3 | 0.3 | 1000-2000X | 0.24-0.12 | 1500-3000X | 0.16-0.08 | 2000-4000X | 0.12-0.06 |
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